The Design Of Ultra-low Temperature Pressure Sensor Structure

Ultra-low temperature pressure sensor is a pressure sensor which works in lowtemperature environment within the range of4K~110K. In many types of pressure sensors,because of their special application environment, people are growing to pay more attention inthe ultra-low temperature pressure sensors, especially in the case of more and more liquidhydrogen and liquid oxygen used as fuel. The ultra-low temperature pressure sensors are usedin the fields of aerospace, industrial and transportation.This paper introduces the research status of ultra-low temperature pressure sensor at homeand abroad. We discuss the working principle and design the structure of the ultra-lowtemperature pressure sensors. The article also innovative use polysilicon nanofilm as sensitiveresistor and used it in the ultra-low temperature environment, opened up another applicationdirection of the polysilicon film. The production process of the sensor designed in our paper issimple and compatible with IC technology, and need low production costs.In this paper, using the finite element analysis ANSYS software, modeling and analysisingof stress field distribution of the elastic pressure membrane, determine the location andarrangement of the polycrystalline silicon pressure-sensitive resistor. On the basis oftheoretical analysis, introduce the design process of each sensor parameters, including elasticmembrane dimensions, varistor and layout design.On the basis of the research process, we draw the layout of the sensor processingaccording to the design of the structure, and design the process of the sensor and present thedetailed process steps of the processing. In addition, the package structure design of the sensorand packaging technology conduct a preliminary study.