Research On Solar Wafers Transfer Robot With Theer Degree Of Freedom

Industrial robots are gradually replacing the manual to complete somecomplex work,wafer manufacturing requires a high degree of environmentalcleanliness．In order to improve accuracy and efficiency,a large number of robotsbeing used to replace the manual completion of processing,handling and otherwork．This paper takes the solar wafer transfer robot with three degrees of freedomas the research core,developed a specialized solar wafers for high-precision automatic handling robot based on Descartes Cartesian coordinate system．Thismanipulator has high positioning accuracy,simple control,and can replaceartificially handling methods to realize the local automation production of solarwafers．First,this paper discusses the mechanical structure of the manipulator,analyzes the structure of the manipulator of coordinates,and finally selected therectangular coordinate form．Robot adopts ball screw-to achieve the movement inthree directions．Open-loop control mode is determined according to theperformance requirements and features of the robot．Adopt stepper motor as amanipulator drive component,PLC as control core,then define the overall structureand control system ofthe wafer transfer robot．According to the performance requirements of wafer transferred fast,this paperconducted a time optimal robot trajectory planning to make the manipulatorhandling complete in the shortest time．Then interpolation operation is usedaccording to time optimal trajectory road．Using the straight-line interpolation andcircular interpolation,and propose the concrete implementation according to thecharacteristics of stepping motor．When developing solar wafers to manipulator software program,ladder isprepared by sequential design procedure,and reasonable distribution of PLCinternal storage space．Finally,the robot completes the assembly and commissioning．Performanceof the robot is verified through different tests．Analyzed the gravity deformationlocalization accuracy for error and the influence of positioning accuracy．Using pulse compensation to compensate to reduce error of the manipulator．...