The Studies On The Fabrication And Characterization Of ZnMgO Solar-blind UV Photodetectors

MgZnO films possesses unique figures of merits, for MgZnO based UV photodetectors, making a higher detection sensitivity, such as large tunable band gap (3.3 eV to 7.8eV), low growth temperature and blindness to visible light.In addition, the bio-compatible characters and environmental-friendly make MgZnO alloys more attractive. In this thesis, we deposited cubic MgZnO thin films by LP-MOCVD and prepared MSM structure MgZnO-based solar blind detectors.The main contents are organized as the following:1. By improving the growth conditions of MOCVD, we deposited higher crystal MgZnO alloys thin films.2. The annealing behaviors of cubic Mgo.57Zno.43O thin films by metal-organic chemical vapor deposition were studied. After annealing at 550,650,750,850℃in oxygen atmospheres, the crystal grain size and surface smoothness of the MgZnO thin films show continuous significant improvements.3. On Mgo.54Zno.46O film we fabricated MSM structure photodetector. The photo-detector shows a peak response at 260 nm and the cutoff response wavelength of the photodetector is located at 277 nm at 15 V bias. The dark current is 3 pA at 5V bias.