The High Peak Power Electro-Optic (E-O) Q-Switched 266nm UV Laser

266nm ultraviolet laser has widely used in industry, micro processing, photolithography and micro carved tchnology, high resolution spectroscopy, medicine, etc. In this dissertation, 266nm ultraviolet laser of the high peak power by electro-optic(E-O) Q-switched has been deeply studied from theory and experiment. The main contents are as follows,By octave efficiency formula, the effect of walk-off angle and crystal length on octave efficiency are analyzed. Phase matching angle, effective nonlinear coefficient and walk-off angle at 532nm octave 266nm using KDP and BBO crystals were calculated. Phase matching parameters of nonlinear optical crystal for fourth harmonic has been analyzed in contrast.Using KDP crystal for the extra-cavity fourth-harmonic generation, the high peak power 266nm UV laser is experimentally realized. Fundamental frequency laser is generated from an electro-optic(E-O) Q-switched Xenon lamp pumped Nd:YAG laser. KTP crystal and KDP crystal are respectively used for the extra-cavity second-harmonic generation and fourth-harmonic generation. Ultraviolet laser pulse energy of 34.9 mJ/pulse is achieved at the repetition rate of 1 Hz. And peak power of 4.3 MW. Ultraviolet laser single pulse energy of 28.9 mJ/pulse is achieved at the repetition rate of 10 Hz. Conversion efficiency of 532 nm to 266nm is 30%. BBO crystal are used for the extra-cavity fourth-harmonic generation Ultraviolet laser pulse energy of 31.2 mJ/pulse is achieved at the repetition rate of 1 Hz. For the experiment results of KDP crystal and BBO crystal, we has a comparative analysis.