Research On Design And Realization Of A Mini Giant Magnetostrictive Inchworm Linear Motor

With the development of modern science and technology, there is an increasing demand for active-materials-drive linear motor in the cutting-edge field of precision optical engineering, semiconductor manufacturing, super precision microfabrication and measuring technology and astronautic industries in nowadays. In this background, this thesis presents a magnetostrictive inchworm linear motor which has the potential to secure a long stroke with mini size and nano-metric positioning. The design of the magnetostrictive inchworm linear motor is based on inchworm motion principle and giant magnetostrictive actuators (GMA). In this thesis, the research on the linear motor includes basic theory, structural design and optimum analysis, experiments and control system of the motor.Chapter 1 introduces the characteristics and classification of linear motor and summarizes the development of the technology of linear driver technology. and then briefly describe the characteristics and hysteresis model of giant magnetostrictive material and principle and the classification of inchworm linear motor.Chapter 2 raises the design requirements of the mini giant magnetostrictive inchworm linear motor firstly, then recounts scheme of the global motor, the pushpart, clamping mechanism and the guiderail of the motor system and presents the detail design of GMA.Chapter 3 introduces the detail design, optimization and experimental verification of the critical parts of the motor, which are the lever-type flexible displacement amplification mechanism (DAM) of clamping part and the bridge-type flexible DAM of push part. Chapter 4 establishes the dynamic model of the magnetostrictive inchworm linear motor according to the motor's mechanical structure and characteristic of GMM. The model may be used to simulate the dynamic motion of the linear motor on input signals at different amplitudes and different frequency. The simulating results will be used to compare with the experimental results and to do locomotion analysis of the general motor system.Chapter 5 introduces the experimental facilities and the setup of the experimental platform firstly, then the speed performances, positioning resolutions and reset states of backwards and forwards are checked with experimental tests and the experimental data are analyzed at the end of the chapter.Chapter 6 presents the tests based upon the research work in chapter 4 and in chapter 5, and a step-span positioning closed loop control system is created in an attempt to realize the nano-metric positioning. The related experiments are carried out and the positioning error is discussed.Chapter 7 summarizes main work of the thesis, and discusses the further researches finally.