Research On The Key Technologies Of Fast Axis Servo System

The non-rotational symmetric optical parts are applied more and more widely. For the non-rotational symmetric surface with millimeters'sag, it is difficult to cut by the traditional Fast Tool Servo (FTS, short stroke) and Slow Tool Servo (STS, low frequency). This dissertation developed a new fast axis servo system (Fast Axis Servo, FAS), which uses porous aerostatic bearing to support the guide and is driven by voice coil motor directly without mechanical backlash. The FAS is very suitable for machining these parts efficiently and high accurately, owing to its long stroke, high frequency response, ultra-precision movement and high stiffness. It is great significant in production.In this dissertation, according to the design need of the FAS, porous aerostatic bearing, the design and optimize of FAS device, driver control, assemble of the FAS, static performance test and other aspects research were studied. The main contents are expressed as follow:1) The theoretical model of porous aerostatic bearing is established. Its performance is calculated numerically and simulated with finite differential method (FDM) and ANSYS respectively. The experimental contrast analysis between the orifice surface compound restricted and porous material with different aperture aerostatic bearing is developed. The porous material and its parameters are determined primarily.2) The structure of the FAS is designed and optimized. Various aerostatic guideways are simulated and analyzed using ANSYS. Two different the FASs are finished.3) The drive system of the FAS is designed. According the design requirements, the calculation and analysis for the drive system of the FAS are done and the corresponding voice coil motor, motor diver, power and feedback sensor are determined.4) The prototype of the FAS is developed. The static performance of the FAS was tested and analyzed, and the feasibility of the FAS is verified.