Research On A 3-D.O.F Platform Driven By Giant Magnetostrictive Actuator

In last decades, high-tech industries are well developed in many countries. Manufacturing of products in many areas such microelectronics industry and optical industry often demands a delicated environment like gentle vibration or precision positioning. This thesis is a study on 3-d.o.f platform driven by giant magnetostrictive actuators. A series of simulations and experimental tests are carried out. The study using three giant magnetostrictive actuators (GMAs) as drivers, takes displacement for feedback which is measured by laser displacement sensors. In addition, adaptive algorithm is using for control of the GMA. The work could be summarized as follows:In chapter 1, the significance of the study and the development of drive platform are presented. The contents of this thesis are introduced.In chapter 2, a new kind of 3-d.o.f. drive platform is introduced, finite element analysis is taken on flexure hinges and the constitutive model of GMA is described. Eventually, the dynamic model of the system is established. According to the model, a simulation system based on SIMULINK is carried out. The simulation results verify the model and may serve for the active control analysis of the platform system.In chapter 3, study on active control of a single GMA is carried on. The difference of PID control and minimum variance control is clarified. The significance of introducting inverse compensation controller is discussed.In chapter 4, some basic characteristics of 3-d.o.f drive platform are tested. On the basis of chapter 3, control method is extended to 3-d.o.f drive platform. Coupling and control stability problem are discussed.In chapter 5, experimental system of the GMA and 3-d.o.f drive platform is established for experimental verification.In chapter 6, main work of the thesis is summarized, and the further researches are dicussed, finally.