Mechanical System Design And Simulation Of Reticle Stage

Lithography is the foundational equipment of integrated circuit industry, and the line breadth of lithography determine the characteristic size of integrated circuit. The improvement of manufacture level of lithography can arouse the technique of the whole integrated circuit industry, which can also promote the development of national economy and raise the competitive power in high-technology area at the same time. Extreme Ultraviolate Lithography(EUVL) is the hotspot of the manufacture of lithography now. The reticle stage is the core constitutal part of lithography. Becouse of the alignment precision and industrialization of EUVL, the reticle stage must realize high-speed,large-scale and nanometer level translation. This made reticle stage become a complicated machine which related to electricity,gas and magnetism.Make use of the software of SolidWorks,static analysis of ANSYS,model analysis of ANSYS and topulogical optimization of ANSYS to complete the structural design and optimization of reticle stage and make the natural frequence and quality attain to the design requirements. The reticle stage adopt double structure, which include micropositioner and macropositioner. The macropositioner adopt H-type drive with linear motor and air bearing support, while the drive and support of micropositioner adopt voice coil motor .Starting and stopping linear motor will arouse an overshoot of the reticle stage, It's need to get the stability time of the micropositioner,reticle supporting system and basic syetem with the transient analysis of ANSYS. The driving force of linear motor exist cyclical swing, which will arouse the vibration of macropositioner. The maximum amplitude have been got with the harmonic analysis of ANSYS. The basic system has been analyzed with the random vibration analysis of ANSYS.Make use of SolidWorks,GAMBIT and FLUENT to complete the design of air bearing slideway. the vertical and horizontal stiffness are 93.46 N/um and 121.56 N/um respectively.The thermal-structure coupling analysis is carried on reticle board, of which the deformation will directly influence alignment precision. When alignment precision caused by deformation of reticle board cann't attain to the design requirements, three measures are put forward to make it reach the reqirements.