| Nanoimprint technology is the nanometer scale to obtain a copy of the agency's technology invention by Chinese scientists in the mid-90s in the 20th century, named Professor Zhou Yu's in, its process flexibility, processing speed, low cost, high yield, attention by national engineers and scientists. Each year, new progress and breakthroughs, as the focus of academic research。Nanoimprint can be divided into hot embossing, UV embossing, microcontact stamping, etc., but they need to imprint the template, this thesis is to study the nano-imprint template and preparation 99.99% pure aluminum by a second anodic oxidation, By adjusting the anodizing voltage, temperature, reaction time to achieve a controlled pore sizes of porous alumina template Diameter 50-80nm, pitch 100-135nm, and nano-imprint with this template , get regular structure of nano-columns, column diameter of about 80nm, distance between columns about 130nm .Basically consistent with the pattern of porous alumina template can not be transferred Nano-column height fluctuations, surface roughness is not satisfactory, Based on this, to improve the function of the template, on silicon anodized aluminum and then a second to get aperture 100nm, 144nm pitch pattern of the porous structure, As for the second silicon anodized aluminum, holes surface roughness have been well addressed by nanoimprint this template are the scanning electron microscope image analysis, found the nanorods have good regularity and smoothness, but there will be some regional patterns are degumming phenomenon. The results showed that the use of porous alumina nano-imprint templates, patterns can be transferred more complete, the basic regularity of the holes arranged in line with the template, some regional patterns are degumming because holes of the template not very vertical and with out nano-imprint process on anti-sticking. |
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