Experimental Research Of Machining Large-scale Micro-Nano Polymer Structrues Based On AFM

In recent years, more and more researchers did some studies on AFM. Especially when the research field spreads from the measurement field to the machining field, machining micro-nanometer structure by AFM had become an important research area in the field of micro-nanometer processing. At present, machining micro-nano structures by AFM within a small scale had been studied in detail. However, the machining scale of the structures is limited because of the hysteresis and nonlinear of the piezoelectric ceramics of AFM. On this basis, a new system with a high precision two-dimensional stage is set up by which researches can go on and many micro-nanometer regular structure in a big scale can be machined. All these play an important role in extending the application of AFM.This thesis aims to do some research on micro-nanometer polymer structure machining in a big range by the new system. First, machining the two kinds of polymer PMMA and PC in a small scale, The Taguchi method and single factor analyze method are employed. The main purpose is to optimize force, feed rate, machining direction and speed. The machined structures are nanoline structures and micro square hole structures.Then, in view of the machining limitation that AFM had, the software program that AFM itself must be developed and improved. What's more, combination control of AFM and stages can be realized. AFM and two-dimensional stages get connected through the serial communication. Procedure of the stage is programmed by the program VB. The stage can be controlled by the corresponding instructions. Then, the AFM and stage can be controlled by a host computer through the VB program to realize automatic processing of more complex structures.Finally, do some research on how to realize the better consistent processing results. The problem of stage vibration is solved by the PID adjustment, and do some research on tip wear and soft material that adhere to the tip through plenty of machining experiments in a large scale. The law that how the micro-nanometer structures influence the tip wear through the machining result analysis is achieved. Making up some compensation during the processing, at last, micro-nanometer large-scale polymer structures processing with better consistency can be realized.