| Though low-E film has been widely used in construction for its excellent spectral selectivity performance, there are many problems, such as the precise control of film thickness, poor stability and high oxidation tendency of functional layer as well as weak adhesion between the functional layer and the substact etc. On the basis of Drud modle, optical constant of TiO2/NiCr/Au-Ag/NiCr/TiO2 composite film has been calculated by characteristic matrix, structure of the composite film and the thickness of each layer have been designed, each layer has been controllable synthesized by magnetron sputtering, and the working parameters for the desired thickness of films have been estabilished by the film thickness using Film Thickness Measurement System and Ellipsometer. Using the XRD, FESEM, AFM measurement to analysis the microstructure of the sample surface. Using the VIS-NIR spectrophotometer and the infrared spectrometer to analysis the optical properties of the samples. then characterize its Low-E performance. The main contents of the study are as follows:(1).Identified the thickness of the composite film system and the parameters for the sputtering process.Determine the structure and the thickness of each layer for TiO2/NiCr/Au-Ag/NiCr/TiO2 composite film system according to the Drude dispersion and optical theory. TiO2(50nm),NiCr(5nm),Au-Ag(20nm). Combined with the Film Thickness Measurement System and Ellipsometer measurement, Optimize experimental programs to determine the applicable operating parameters.(2).The preparation and the performance analyzation for functional layer of Au-Ag. The functional layer Ag and Au-Ag alloy film was prepared on the glass substrate,PET flexible substrate,silicon wafer, the relationship between the microstructure and optical properties of Ag and Au-Ag alloy film was investigated, and the stability of Ag and Au-Ag alloy film was also compared. The results show that, The growth pattern of Ag film is taken from the island growth to layer growth and then to layer plus island (or Stranski-Krastanov)modes with the increase of film thickness.the addition of a small amount of Au enhance the binding force between the film and the substrate, reducing the RMS Roughness of the surface, the growth pattern of Au-Ag alloy layer does not changed with increasing of thickness, maintaining layer growth. Ag coating peeled off seriously after mantaining at room temperature for 30 days and the the transmission rate in vis-nir region remained at 70%, resulting a loos of functionality; the surface of Au-Ag alloy film is still compact and uniform, the transmission rate in vis-nir region Only reduced by 5%(3).The preparation and performance analysis for dielectric film TiO2. Two methods have been introduced for TiO2 film preparation including direct sputtering using TiO2 ceramic target and reactive sputtering of Ti target with O2.The influence of synthesis method on the optical properties has been studied, indicating that the TiO2 thin films prepared by TiO2 ceramic target behave a planar growth mode and their RMS roughness is down to 1.03nm.The transmission rate of the corresponding compsite film at 1000nm decreased to 39.4%, which is efficent to prevent the oxidation of functional layer resulting Low-E film with high quality.(4).Structure optimization for TiO2/NiCr/Au-Ag/NiCr/TiO2 composite film.Based on the calculated and experimental results, the optimal low-E performance of the sample obtained by optimizing the structure of composite film is as follows:the transmission rate is up to 82.5% and the average transmission rate is 73.2% in the visible region(380nm～780nm) and the average transmission rate is 73.2%; while the average tranmission rate is 86.3% in the far infrared region (4.5μm～25μm), the corresponding emissivity calculated is 0.11, which has exceeded the 0.15 application standard of glass available in the building walls and automotive front block etc. |
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