Research Of Wave-front Detection Method Based On Hartmann-Shack Sensor

Hartman-Shack wave-front sensor was early used in astronomy to measure the aberrations of the optical system. At present, Shack-Hartman wave-front sensor has been widely used in adaptive optics,surface detection and human vision. Hartman-Shack sensor mainly contained micro-lens array and CCD. In this setup, the light is reflected from the mirror, passing through the test lens and micro-lens array, and finally focused on CCD. We analyzed the images captured by CCD, and calculated the Zernike coefficients and reconstructed wave-front.In this thesis, the wave-front detection method based on Hartmann-Shack sensor has been designed, which can detect the aberrations of optical systems and 3D Profiling of optical surface, and the thesis introduces the wave-front detection model based on Hartman-Shack sensor and designs wave-front detection algorithm, including preprocessing image,centroid detection and the modal wave-front reconstruction algorithm used Zernike polynomials, and give the influence factor of centroid detection, and then establish the whole Hartman-Shack measurement system. The thesis proposes the OTSU arithmetic to detect spot centroid in order to improve the detection accuracy before measure the wave-front slope, and briefly describes the system component of wave-front admeasuring apparatus, and then gives the RMS and PV Error of wave-front reconstructed compared to HS wave-front sensor, and then summarizes the measurement system and presents the improvement plan at last.In a word, the thesis researches the method of wave-front measurement for optical flat surface detection and aberration detection based on Hartman-Shack wave-front sensor, and obtains the wave-front aberration of lens element under test.