Surface Plasmon Resonance Devices Based On Photonic Crystal Structure And Applied Research

The device based on surface plasmon resonance have been applied in the field of biosensors, infrared light source and so on because of optical Properties of SPR device, which has high research value and application prospect.The thesis has researched SPR device based on the two-dimensional photonic crystal structure, and performed applied research in the field of biosensors and infrared light source.The work of the thesis included five facts shown below:1. A kind of SPR device based on the two-dimensional photonic crystal structure have been designed and fabricated. The SPR basic device is structured by Si-SiO2(650nm)-Cr(100nm)-Au(800nm), then patterned with a periodic array of perforations (hole depth=5μm, the hole shape is circular), using photolithography and reactive ion-beaming etching (RIE), Structures with eight different parameters contained varying lattice constant, varying, varying diameters, and varying symmetries of hole array have been fabricated.2. The relation between reflection spectrum of infrared light emitters and structure of metallized-surface 2D photonic crystal has been studied systematically. The experimental data has been compared and analyzed with simulation results from finite-difference time-domain (FDTD) calculation. It is found that the peak wavelength was proportional to the lattice constant. For emitters with same lattice constant, the larger the ratio, the stronger the reflection. For emitters with same ratio, the smaller the diameter, the stronger the reflection. The emitters with hexagonal array among three different symmetries of hole array, has the best reflection spectrum3. A novel SPR-MEMS infrared light source have been designed and fabricated based on the research on infrared radiation characteristics of the SPR device. Four different light source structure have been designed, the infrared light sources are structured by Si-SiO₂(650nm)-Si₃N₄(200nm)—Pt(200nm) and Si—SiO₂(650nm)—Si₃N₄(200nm)—Pt(200nm)—Si₃N₄(200nm)—Au(80nm), then patterned with a periodic array of perforations (hole depth=5μm, the hole shape is circular). The SiO₂ and Si₃N₄ are insulation layers, the Pt is filament material. Two shape of filament have been designed which are flat-heating model and Gongzi heating model. The process have been progressed to the last step back-etch process.4. The applied research on detecting HIgG biological molecules have been performed. By surface modification of the SPR device and combining antigen and antibody, using FTIR spectrometer to measure three different infrared reflective spectrum. By comparing the reflective peak of the reflective spectrum, the HIgG biological molecules can be detected.5. A novel method of fabricating tunable photonic crystal has been invented. The SPR device is utilized as a template and by nano imprinting technology, the agarose hydrogel tunable photonic crystals have been fabricated.