Based On Micro-change Of The Flexible Substrate Technology

The micro transducers with flexible substrate have showed great advantages for some special application. In this paper, the processing methods of micro transducers with three types of flexible substrate are presented. And micro balloon actuator array with metal-based substrate and micro tactile sensor with polyimide and PDMS substrate are developed.As a typical metal-based flexible micro transducer, a micro balloon actuator for active flow control is developed. The structure of micro balloon actuator was designed. And the actuators are fabricated by specific processing. Load-actuation deflection behavior of the actuators has been characterized, which shows such kind of actuator has high load limit and good linearity of pressure load-deflection behavior. Wind tunnel experiments are carried out. And the results indicate that the micro balloon actuator is an effective means for the drag reduction or lift increase of airfoil.Utilizing polyimide and PDMS as substrate respectively, two kinds of flexible micro tactile sensors are developed. The structures of these sensors are designed and the detecting circuit is described. The focus is on the optimization of the structure dimension. And the corresponding fabrication processes of the sensors with two substrates are investigated. One kind of the sensors is fabricated using the flexible copper-clad polyimide film.