Ellipsoid Resonant Cavity Microwave Plasma System

Recently MWPCVD (microwave plasmas chemical vapor deposition) technique has attracted more and more attentions of the researchers all over the world, it is a new produce technique. With the development of the industry, the need of the high performance material urge people to open up the big power equipment, the cylindrical cavity could not suffice the need. Because of its own feature of the structure, ellipsoidal cavity has coupling microwave generated from one of the ellipsoidal center, and plasmas generated from the other ellipsoidal centre, so the plasmas is very centralize, so we can enlarge the area of disposition.This thesis calculated the distribution of the electro-magnetic field inside the ellipsoidal cavity based on Maxwell equations and boundary conditions. It also roundly researched the solution of the Helmholtz equation in the circumrotating ellipsoidal coordinates, and discussed how to calculate the solution of the electro-magnetic field in the circumrotating ellipsoidal coordinates using special functions, and researched circumrotating ellipsoidal cavity's latent value and quality parameter using arithmetic simulation, finally we compared the ellipsoidal cavity with the spheriform cavity.The main content of this thesis are as following:1. Calculated the distribution of the electro-magnetic field inside the ellipsoidal cavity based on Maxwell equations and boundary conditions, and confirmed the syntonic mode inside the ellipsoidal cavity using arithmetic methods.2. From the finite element theory and finite integral's aspect, analyzed the structure of the high frequency field inside the ellipsoidal cavity with arithmetic simulation that carried through in computers.3. Compared and analyzed the influences to the mode of the electro-magnetic field and also the influences to the position where the plasmas produced when changes the size and the internal structure of the cavity.Based on all above, we also analyzed the interacting principles of the plasmas and electro-magnetic field inside the ellipsoidal cavity, depending on the different features of the electro-magnetic field and the plasmas.