Field Emission Cold Cathode Tip Preparation And Performance

Vacuum micro-electronics device which based on field emission has become the focus of people around the world , and it have lots of advantages such as low power consume, big current density ,high frequency and so on. The whole performance of device depends on the capability of field emitting cold cathodes which act as the kernel of all kinds of vacuum micro-electronics device.People take much measure constantly to improve the whole performance of device through mending the cathode structure and optimizing cathode preparation methods. Among them, finding new material of emitting cathode is a central way to enhance the performance which be given a favorable condition offered by development of science and researching of new material.When we produce field emitting cold cathodes, we must consider not only the work function, conductance, density, reliability and mission capability but also the demand of technique. At present, Lots of material and preparation methods of field emitting cold cathodes are being developed. But the material of emitting cathode is mostly present with big escaping power,low reliability,low uniformity and emission capability . LaB6 , as one kind of better material , is so perfect with it's excellent physical and chemic characteristic. According to the literature in the world , now the research of LaB6 is not mostly concentrated in field emission but hot emission.Preparation of LaB6 field emitting cold cathode is correlative with it's physical and chemical characteristic. Now ,there are little literature that can be used for reference. A large number of attempt and painstaking experiment have been done in this paper according to existing project. We also do lots of chemical and electrochemical etching research in material of LaB6, and find out three kind of methods to produce the field emitting cold cathode including reactive ion etching (RIE) with oxygen, wet process etching and electrochemical etching. Through produce some field emitting cold cathode single tip including LaB6 field emitting cold cathode, molybdenum field emitting cold cathode, tungsten field emitting cold cathode, tungsten rhenium field emitting cold cathode, molybdenum covered with LaB6 film field emitting cold cathode. We sum up the preparation of LaB6 field emitting cold...