High-accuracy Plane Positioning And Control Technology

The precise alignment technology which can apply to many subjects as exact science and electronic engineering is an important and essential high-tech. At the same time it is also all-around technology and including optics, electronics, mechanics, computer, signal processing, sensor and measurement. This paper presents a technology which detects the position and alignment with moiré signal of laser. It analyzes the relationship between the displace error of two gratings and the intensity of moiré signal, deduces the equation of double gratings diffraction, build mathematics model of high precise position detection and simulate with computer. The plane alignment algorithm is presented based on linear alignment, random multi-state position is researched and fully automatic plane alignment is accomplished. Fuzzy theory and artificial neural network theory is applied to alignment aim at non-linearity and difficulty in modeling, intelligent and high speed alignment is fulfilled.