Piezoelectric Self-sensing Actuator Research And Development

This projiect is supported by National Natural Science Foundation of China (No.66974020)? ≤The principle of integration and researches of control-system of piezoelectric microactuator≥, this project emphasize the study of principle of integration of sensor and actuator and method of realizing.In general test's system, it is necessary that sensor and actuator, sensor and actuator are mutual independent elements, execute respective functions. Thanks to continual development of intelligent materials, well using physical character of intelligent materials, we will integrate sensor and actuator into a element, this achieves aim of optimizing system.Piezoceramics possesses intelligent character, this project uses piezoceramics, utilize structure of piezoelectric bimorphs of cantilever beams, this structure is not only sensor but also actuator, we name it self-sensing actuator. Aims of project are that this structure is not only sensors of displacement and force but also actuator of displacement and force. Contents include several aspects as follows, first of all, establish model between inputs and outputs of structure of piezoelectric bimorphs of cantilever beams, basing on model, confirm means of realizing self-sensing; second, compensate hysteretic no-linearity of piezoelectric actuator , hysteretic character brings error of self-sensing, we cann't neglect; author reseached several hysteretic model, eventually,author emphasized to study switch-proportion and Prandtl-Ishlinskii operator of play-type, used Prandtl-Ishlinskii operator of play-type .achieved well effect of compensation; Finally, author reseach examinations of self-sensing, owing to creepage in piezoceramics, it bring error of examinations, author introduce method of software compensation, remove effect of creepage, in addition to, examinations prove correctness of method of self-sensing.