| A novel angular rate sensor called MEMS fluidic gyroscope is researched in this paper, and its whole structure is fabricated MEMS process completely. The principle of MEMS fluidic gyroscope is based on synthetic jet theory and hot wire anemometry, making use of different convective energy exchange during various velocities by air flow. When there is a angular rate supplied, the air flow across the symmetrical distribution hot wire, which is mounted on the detective chamber, isn't equal any more, which result in different resistances and outputting a differential signal through electrical bridge. Comparing with traditional fluidic gyroscope, MEMS fluidic gyroscope takes the advantage of small voltage, anti-overloads, low consumption and cheap cost.This thesis is mainly focus on the analysis of MEMS fluidic gyroscope's performance and fabrication process. MEMS fluidic gyroscope is firstly manufactured on silicon substrate and glass substrate individually, then bonding together to form the whole device. Some crisis processes are researched in detail and some problem-solving method is discussed in this paper. The critical technical processes include fabricating 1.5 mm in length and 200 um in height from the surface below suspended hot wire on glass substrate; taking advantage of composite mask to make four kinds of chamber in different heights; designing ANI-ISO-ISO dry etch process method, in order to realize the low resistance connect form the vibrating diaphragm and silicon surface. Besides, two numerical simulation software, called ANSYS and FLUENT, are used to simulate the performance of mechanical part and fluidic part. Some important structures of this device are test by various methods, simulation and test results are displayed, followed by theory's explanation. |
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