Micro Inertial Measurement System Critical Devices

With more and more widely used of Micro Inertial Measurement System,micromation is the important developmental direction. This paper mainly focuses onthe research of two key parts of the Micro Inertial Measurement System—micromachined accelerometers and microswitch, it will solve the micromationquestion which Micro Inertial Measurement System uses in the new generationrocket. Firstly a silicon micro-machined piezoresistive high-g accelerometer is studiedwith its work principle and design and fabrication in details. In this part, we discussthe fabric parameter design of the micro-machined piezoresistive high-gaccelerometer with cantilever and confirm the configuration dimension of the qualitymass and the cantilever. The processes and the mask are given in this part. In second part, we introduce the research of microswitch, which is anotherimportant part of the Micro Inertial Measurement System. We contrast some kinds ofswitches widely used now and find they can't meet the apply require of the newgeneration rocket, we introduce a new kind of micromagnetic switch. In this paper,we discuss the principle of operation of the microswitch. The microactuated partconsists of cantilever, torsional girder, trip coils and permanent magnets. Thecantilever beam has two stable positions as the permanent magnets are used. Weoptimize its configuration. The mode and static characteristics of these devices aresimulated with the FEM tools ANSYS8.0. This paper also gives out the results of theparameters'measurements.