The Maglev Mask Sets Of The Structural Design And Its Properties

Magnetic levitation technology has been paid attention broadly due to its excellent work performance such as no mechanical contact, no wear, etc. The load-bearing characteristic depends on the design and parameters of the maglev structure. Based on Magnetic levitation technology and lithography mask principles, a novel maglev lithography mask platform was presented in this paper. Its detailed structure design was carried out to achieve high-precision and high-speed positioning motion of the platform.A novel case adopting both U-type and E-type electromagnet was proposed, and the calculation of the two kinds of electromagnetic force was carried out. Then the 2D magnetic field of the platform was simulated and analyzed with the finite element software. A method was finalized to minimize the coupling among the magnetic field.A mechanical model of the mask platform was established, and its statics and modal analysis were carried out. The statics analysis maily included the bending deformation and stress distribution of the mask platform, which were studied under two conditions of static state and suspension motion. While the modal of some key parts and the whole platform was also calculated, respectively. The discussion about the whole platform modal was researched under two cases of static state and suspension motion. By analyzing the results of the statics and modal analysis, the weak regions were located at lower solenoid position of the platform, and the structural sizes of some key parts were optimized.To analyze the influences caused by the heat generated from electromagnets, the heat generation mechanism as well as heat distribution law was studied with finite-element method. The analyses showed that when its work environment is normal pressure and temperature, the electromagnet temperature is not always increase and the cooling mechanism is not necessary. However, when in the vacuum environment, the temperature of electromagnet always rises up. It is indispensable to add cooling mechanisms for the electromagnets to reduce the temperature. Some experiments were also conducted to testify the analyses. Finally, the cooling mechanism was simply introduced in the vacuum and the corresponding cooling effect was also preliminarily investigated with simulation.