Study On The Equipment And Technics Of Coating Ni/cr Multiplayers On Cu Substrate

Long time ago, our country always adopts the method of electric plating with Ni/Cr on the hot-water part. The yearly output is large and the products are exported. But electric plating has its inevitable fatal shortcomings, that is the serious "three wa-stes",the toxicity is heavy. It affects our environment seriously and has a big threat to our health. In this condition, it is very necessary to develop a new free-pollution method to replace the traditional method. Using vacuum method to deposited trimmed film can avoid polluting, reaching the purpose of environmental protection. On the basis of present vacuum technology in Ni,Cr depositing, we adopted the method of magnetron-multiple arc to deposit Ni/Cr film. According to the analysis of film performance and majorization of processing parameter, we achieved rather ideal experimental results.This paper main includes:First, refitting a magnetron-multiple arc coating machine. We installed magnetr-on Ni target and multiple arc Cr target in the target position of the vacuum chamber, so that it can deposit Ni and Cr continuously in one cyclic, conveniently and non-polluted.Second, designing a new magnetron sputtering target. Because Ni belongs to ferro-magnetic material, it has a big magnetic conductivity and serious magnetic-shade phenomenon, so it can't sputter. Against this phenomenon, this paper makes uses of the FEMM magnetic field analyzing software to simulate the magnetic field of magnetron Ni target; also by adding sided magnetic circle and the magnetic field of target area, we can enable the magnetron sputtering normal.Third, using the magnetron-multiple arc coating machine, we studied the impact of target-base distance,negative-bias,pressure,temperature and current to the method of magnetron to deposit Ni film; Besides, we developed the method of magnetron to deposit Ni film on the yellow brass. We also use the technology of multiple arcion to deposit Cr on the Ni film, achieving the couple of two methods.Fourth, we analysed the film. The film's morphology was characterized by metalloscope and scanning electron microscopy. The films'phase structure was detected by X-ray diffraction spectroscopy (XRD).At the same time, we detected the film's surface roughness and thickness. We also used the salt spray tester to test the film's corrosion resistance.The result shows that the Ni film deposited by magnetron-controlling method has a good glossiness and the surface is smooth. After Cr is deposited by multiple arc, although the roughness has a little increase, it can reach the request of the decorated film. And according to the corrosion resistance, we found that the film has a good corrosion resistance about 137 hours if the film is very thin, surpassing the film deposited by electric plating and electric arc technology. This experiment basically satisfied the request.