Preparation And Characterization Of Copper Oxide - Zirconium Composite Membrane

This thesis is attempting to prove that the best preparation conditions have beenachieved from the experiments on the effects of the different operating conditions on theperformances of the films and deposition rate. These experiments adopted metallic Zrtarget and ceramic CuO target to prepare Zr films and CuO films by means of magnetronsputtering.The morphology, chemical composition and phase constitution of the prepared filmswere analyzed through SEM, EDS and XRD. The results show that the films were smooth,that the chemical compositions of the films were basically the same as those of the targets,and that the films were crystal.The photoacoustic spectrums of Zr films, CuO films and CuO-Zr films which wereprepared under the best preparation conditions, were examined and analyzed. The resultsshow that the photoacoustic spectrums of these films were basically the same with anegative wave crest coming first and then a positive one. For the same film, the peak valueof the photoacoustic spectrum rose with the increase of the laser energy. Exposed to thesame amount of laser energy, the peak value of the CuO film was greater than that of the Zrfilm, and the peak value of the CuO-Zr film was greater than that of the single film. Thedifferences of the peak values were proved to be resulting from the chemical reaction heatbetween the Zr film and the CuO film.