| The multilayer films composed of hard-magnetic phase Nd-Fe-B and soft- magnetic phase a-Fe were deposited by RF magnetron sputtering. The effect of the annealing temperature and the structure of multilayer on the surface morphology and magnetic properties of discontinuous Nd-Fe-B/ a-Fe multilayer films were investigated. Magnetic properties of the discontinuous multilayer films were measured with Vibration Sample Magnetometer (VSM) respectively. The phase structure of the films was determined by X-ray Diffraction (XRD). The component of the films was analyzed by Energy Spectrometer(EDS) and Auger Electron Spectroscopy (AES). The surface morphology of the films were observed by Scan Electron Microscope (SEM) respectively. The result showed that:The technical characteristic of RFMS-4 sputtering apparatus in depositing nanometer multilayer film is stable. The concentration and deposition rate of the films are controllable with the optimization parameters on the RFMS-4 sputtering apparatus.For the [NdFeB(15nm)/ α-Fe (x)]10 (x=0,5,10,15nm) and [NdFeB(y)/ α-Fe (5nm)]10(20)(y=5,25nm) multilayer films annealed at 550℃, 600℃, 650℃, 700℃, It is found that coercive force decreases, but remanence and energy product increase with increasing a-Fe volume percentum. The multilayer films has the most energy product when a-Fe volume percentum is 50%. The structure [NdFeB(5nm)/a-Fe(5nm)]2o multilayer films annealed at 650 ℃ has the highest magnetic property: coercive force iHc=148.9kAJm, remanence Mr=264.1kA/m, remanence radio Mr/Ms=61 %, maximal energy product (BH)max = 42kJ/m3. |
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