High Frequency Magnetic Thin Film And Its Application In Electromagnetic Noise Suppression

Face the miniaturization and integration of electronic devices, high-frequency electromagnetic environment becomes more and more worse, EMC issues become the focus of people. In order to achieve suppression of high frequency electromagnetic noise signals, to avoid electromagnetic interference levels between various electronic devices and circuits, and to ensure a good electromagnetic environment, people study a variety of novel anti-EMI components and materials. In this paper, a high-frequency magnetic thin film noise suppressor for the study was carried out to study,the main contents are as follows:1.Using HFSS finite element simulation method to simulate the thin film noise suppressor.The study found a three-dimensional impact on the demagnetization factor and permeability of the film,.It affects the ferromagnetic resonance frequency and noise suppression effect.The film resistors has a great impact on insertion loss and noise signal power loss,the control of thin film resistors is important.Multilayer films can effectively reduce insertion loss due to the eddy current loss in pass band while increasing noise suppression effects in stop band.The new array of nano ferromagnetic thin film noise suppressor is calculated and simulated to improve the effect of noise suppressing,and reduce the thickness of film.2.The preparation of Ni0.22Zn0.52Co0.03Fe2.23O4 ferrite target material.Study the best preparation process of Fe Co thin film using the method of megnetron sputtering.And finally get the result of Argas flow 30 sccm,sputtering power 200 W.3.Use Ni Zn ferrite-Fe Co composite target material to sputter film,and get various thin films with different thickness,with the improvement of the Ni Zn ferrite composition, the film resistivity increased, but the high frequency magnetic characteristics decrease.4.Prepare the transmission line noise suppressor test fixture based on 62333 standard of the International Electrotechnical Commission(IEC).The noise suppression band has been greatly expanded. It has good noise suppression effect between 2GHz-20 GHz, the maximum noise attenuation reaches 10 d B.