The Research On Conformal Acid Etching Process Of Glass Ceramic

Hydrofluoric acid etching is regarded as a very useful method to remove residual stress of vitreous body after being processed. Due to the tolerances of vitreous body after being processed is not seen as important, there is no detailed study about hydrofluoric acid etching. To develop the cryogenic optical system which is used in deep space exploration and the cause of national defense, higher requirements of tolerances of mirror structure and vitreous structure are needed, and the tolerances almost can be guaranteed by the machining process. So it is needed that during hydrofluoric acid etching, the tolerances of vitreous body can hardly been changed. It is extremely important to study the effect of etching and process parameters of etching.In this paper, experiments are completed based on etching principle to prove that hydrofluoric acid etching can remove cracks of glass ceramics to release residual stress. Also, through the experiments, the effect of etching process parameters is studied and some optimization methods are put forward. At last, I solve the problem that during etching process, the acid removal of large size workpiece is different in different parts. Based on the previous study, the tolerances of vitreous structure that can be used in cryogenic optical system remains unchanged successfully during hydrofluoric acid etching.