Efficient Sers Substrate Was Prepared Based On Magnetron Sputtering Technology

Raman spectrum is a vibrating spectrum that related directly to the molecular structure, and it is knows as the fingerprint spectrum of material structures. Any puny changes of structure can be sensitively reflected in Raman spectrum; so it is widely used in physics, chemistry, biology, quality control, as well as archaeology. However, Raman signal is usually special weak. The developments of surface enhanced Raman scattering (SERS) technique enormously enhance the scattering cross section , which leading to the improvement of sensitivity of SERS that uses photons as probe.The average SERS substrates are colloid or rough surface of expensive metal such as Au, Ag and Cu. Generally colloids are prepared by Oxidation-reduction and laser ablation. The colloids prepared by Oxidation-reduction are easy to be got, but there are many disadvantages such as complex components, impurity. The colloids prepared by laser ablation are oppositely pure, but the gain is little. Rough surface is commonly prepared by physical rubbing or chemical eroding. Nevertheless, there are also disadvantages such as hangover, rudimental impurities, and difficult control. Therefore, we'd like to extend the method of preparing SERS-active substrate by magnetron sputtering.Magnetron sputtering technique is a new sputtering technique which has being developed in 70s last century, until now it is widely used in scientific research as well as modern industry. At the same time, magnetron sputtering films are mainly used in electronic industry, record medium, optical communication, magnetism material and so on, which have many advantages, such as low temperature, high speed, and low dandification. Low temperature and low dandification is very important to protect the rough substrate. This makes it easy to prepare the SERS-active films whose roughness is from several nanometers to several hundreds nanometers by controlling the sputtering conditions such as pressure, electricity, time as well as anneal technics . Its repetition and stability is reasonable. Finally, the prepared substrates are very pure, for they are sputtering in a super high vacuum environment.In this paper, the high active SERS substrate was made by Magnetron Sputtering. The surface figure, inner structure, as well as its advantages of the substrate is mentioned in the way of AFM,TEM,SEM,visible and infrared Raman spectra.