Fluorinated Diamond Film Microstructure And Performance Research

The FDLC is a kind of modification material which based ontraditional DLC, The function of the films better than DLC, whichattracted many people's attention, therefore, it is necessary that a deepresearch on the influence of changing fluorinate amount and processcondition of FDLC film properties.Generally speaking, three gases (CF₄/CH₄/Ar) are used to prepareFDLC film on polished silicon slices and quartz slices by PECVDmethed, and the prepared films are annealed. Furthermore, the thicknessof the films before and after annealing is measured by ellipsometer, TheAuger electron spectroscopy, FTIR and Raman analyzed the content offilm, contact angle of the film measured by surface tension measureapparatus, the insulation resistance measured by four-probe and thetransmittance of the films measured by UV-VIS. meanwhile, preparedFDLC/Ag/FDLC Optical multilayer films, compared and analyzed to thedata of Film Wizard.The sdudy shows as follows:1. The Auger electron spectroscopy(AES) (AES) study indicatedthat the film was the typical DLC structure.2. Technological conditions have great effect on the film'shydrophobic nature.With the increasing of discharge ratio, deposition temperature, annealing temperature and deposition power, the film's hydrophobic nature andoil-repellent function was modified.3. With the increasing of deposition temperature and depositionpower caused insulating resistance and surface-hardness increased. 4. With the increasing of deposition temperature and depositionpower, the visiable light transmission rate decreased.5. Thinkness have great effect on the mulfilayer film's visiable lighttransmission rate. Compared software analog data with measured data,this result is in good agreement. In brief, the electric index ofFDLC/Ag/FDLC multilayer film is larger than condutive film, whichprovided prodigious valuable refcrence.