| Diamond is of attractiveness as a material because of its outstanding physical and chemical properties. It has been associated with a broad range of applications in advanced scientific and technological fields, especially in those of high temperature, high frequency and large power electronic devices. However, its application is limited due to the rarity of natural diamond . With the rapid development of science and technology in recent years, synthetic diamond has been successfully grown by chemical vapor deposition and can be a candidate as a new semiconductor chip material due to its excellent properties, which probably leads to a breakthrough and a new era coming in the development of the SLS1 (Super Large Scale Integrated circuits) .Diamond as a basic semiconductor material, just like others, is needed for n-type conduction as well as its p-type counterpart. It is experimentally discovered that the natural diamond is of p-type characteristic, and the CVD p-type diamond can be also obtained and has been industrialized. However, so far the efficient n-type diamond remains unavailable, which hampers its application and exploitation in electronic devices fields. Great efforts have been made both theoretically and experimentally to obtain available n-type diamond materials. There are two methods to obtain n-type diamond: one way is doping with dopants, such as the elements of I, V group, or co-doping with boron-phosphorous and boron-sulfur and so on. However, the results are not available. The other method is that B-doped p-type diamond can be transformed to n-type diamond after deuteration, which is recently reported by Teukam et al (in July 2003). This method may offer a new opportunity for obtaining n-type diamond and resolve its preparation completely. But many problems are needed to investigate, such as the formation mechanism and stability of the donor... |
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