Low Sputtering Rate Mcp Anti-ion Feedback Membrane Experiment

The ion barrier film at the input of the microchannel plate(MCP), which is essentially a thin continuous amorphous Al2O3 film, and its effect on the third generation image tube are investigated in the present dissertation with the aim of improving the characteristics of the third generation image tube.The technique having the function of the third generation of quenching cold and magnetron sputter is one of the practical schemes for depositing the ion harrier film whose organic substrate deposited on the input surface of the MCP which is out of touch with water improves the quality of ion barrier film, and whose ultraviolet radiation decreases the carbon contamination on the active surface of filmed MCP. This dissertation measure experimentally and analyzes theoretically the characteristics of the ion barrier film and filmed MCP, at tains the best technological condition of low sputtering rates Cor depositing ion barrier film, and points out that ion barrier film transmits electrons and stops ion feedback; the volume resistance increase, the electron gain, dark current and detection efficiency decreases for MCP with film. The technological condition for depositing ion barrier filmusing the technique having the function of quenching cold and magnetron sputter is crucial, deviation from which makes it impossible to form a continuous film on the input surface of the MCP, and causes the serious carbon contamination on the active surface of MCP.New technology of ion barrier film at the input of the MCP free of carbon contamination is the effective way to improve the characteristics of the third generation image tube. New technology includes the preparation of a self-supporting continuous organic substrate, deposition of aluminium film and the film-posting. New technology avoids the contact of MCP with organic substrate and the carbon contamination in inner channel surface. The experimental results show that the new processing technique has no effect on the volume resistance, dark current and operating life, has little effect on the gain of MCP, the barrier film prepares by new technology is low carbon content.