Optical Film Thickness Of Real-time Monitoring System And Its Inversion

The development of optical thin films has been greatly promoted and driven by the rapid development and gradual industrialization of the display technologies and optical communication technologies since 1990. People bring up higher requirements to the performance of optical thin films, and hence bring up a more serious challenge to the monitor accuracy during the thin film manufacture. Currently, almost all the famous international coater manufacturers sell the automatic coaters, which not only provide very high monitor accuracy, but also provide automatic monitor. However, the domestic coaters still need manual operation.We do research on the basic principle of optical monitoring for thin film thickness. The advantages and disadvantages are analyzed theoretically. The improvement against the disadvantages and the ways to enhance the accuracy of the optical monitor are proposed. At the meantime, the theoretical analysis for the online reverse of the parameters of thin films is also presented.In order to perform reverse more effectively, filter the noise of monitor signals, and enhance the accuracy of monitor system, optimization algorithms are analyzed to solve these problems. The analysis is instructive for future research, though its application is currently limited by the conditions in practice.An in-situ optical monitor system for thin film deposition is developed. It can be matched to use with the domestic coaters and partially automates them. It's proven by the practice that the system is practical, stable and is easy to operate.At last, the conclusion and advice for future work are made.