| In this paper, The development of vibration-resistant interferometry and several adaptive vibration-resistant methods be introduced. By considering the practical condition and the influence of vibration in interferometer, the mechanical & electric feedback vibration-resistant method be designed. The paper's content including two parts. The first part includes the principle of phase-shifter and the measure methods about some key parameters of phase-shiftor, for example, frequency response, electrostrictive capability and capacitance etc. In the second part, we have designed the piezoelectric actuator power supply and adaptive anti-vibrate' phase-shifter interferometer(PSI) according to experimental results. |
