Study On The Fabrication Of Diamond Tools Using FIB

The performance of the Single Crystal Diamond (SCD) cutting tools, one of themain subjects involved in ultra-precision machining, was determined by theirpreparation, which has a direct impact on the developpment of ultra-precisionmachining. The preparation by the Foucsed Ion Beam (FIB) has realized sizeprecision, nanoscale edge radius and controllable morphology, and it has been provedto be a feasible method to achieve the cutting tools with extrmely sharp edge andcomplex shape. Based on the FIB preparation this paper studied the effects of thedifferent crystal orientations and planes during the SCD tools preparation and themethod and mechanism of utilizing femtosecond laser to ablate the amorphous layerinduced by ions implantation.The choice of certain crystal orientations and planes is one of the key factors inthe traditional grinding tools preparation, which determines the difficulty of thepreparation and the tools performance but was lack in the FIB tools preparation. Thispaper studied the FIB sputtering efficiency, surface quality and other key crafts indifferent crystal orientations and found that the effect of anisotropy weakeneddramatically in the FIB sputtering, which was presumed to be the result ofdisappearance of the effect of physical properties, such as friction coefficient, in nanoscale and the ions cascade collision during the implantation. It provides significantsupport for the FIB tools preparation.The existence of the amorphous layer on the SCD has effects on the performanceof tools and properties of the SCD. To ablate the amorphous layer, a method byfemtosecond laser was proposed. By adjusting the power, polarization direction andsome other parameters of the laser, the amorphous layer was removed withoutdamaging the SCD, which was proved by analysis of morphology, elementalcomposition and atomic structure. The power influence corresponding to the ablationthreshold of the SCD was determined by a large number of experiments. Themechanism of the interaction between the SCD and femtosecond laser was interpretedby summarizing relevant literature, and the feasibility of this method was reasonablyexplained.