Development Of3D Micro Tactile Probe For Nano Measuring Machine

To realize ultra-precision dimension metrology of high aspect ratiostructures in micro/nano scale, a3D capacitance micro tactile probe and a3Dpiezo-resistence micro tactile probe are designed and fabricated based on microelectro mechanical systems (MEMS). Main research contents are as follows:Firstly, structure and principle of3D capacitance probe are discussed. Thenon-silicon based capacitance probe developed previously is optimized. By usingelectroplating and sacrificial layer technology, prototypes of micro capacitancesensor are fabricated. Then assembling is done and two packagings are designed,integrating the probe to calibration device and nano measuring machine.Secondly, principle and structure of3D piezo-resistence probe is studied anddisplacement detection model is built. Displacement and stress distribution are alsosimulated in vertical and lateral load by Solidworks Simulation. Then, output modelof the probe is obtained by designing two piezo-resistence detecting bridges.Thirdly, layout of suspension system is designed. It is fabricated by bulk siliconprocessing technology. Sensing unit is also achieved and sample of piezo-resistencesis tested. By means of self-alignment and self-positioning technique in micro scale,probe assembling is realized. Electric connection to peripheral circuit is also realized.Fourthly, data acquisition system of piezo-resistence probe is designed based onC8051F120and ADS1274. Three axis channels are calibrated. By optimizing precisepower supply, front input channels, PCB layout planning, and algorithm of digitalfiltering, real-time output voltages are obtained accurately and synchronously.Finally, measurement range, linearity, hysteresis, and resolution of the twoprobes are tested. Property and parameters are compared and analyzed. Influencemechanism of probing in micro scale is also researched. In the end, a summary andprospects of the whole thesis are presented.