Preparation And Electrical Properties Of Precursor Pyrolysis Ceramics Of SiCN

As the main product high temperature piezoresi stive Micro-Electro-Mechanical Systems(MEMS) sensor has the characteristic of advanced production technology, and easy to implement systematically and intelligently, and it conform to the future development of the sensor. According to the study, the conversion of amorphous polymer SiCN ceramic with excellent electrical properties, good thermal stability, oxidation resistance and creep resistance, it is ideal high-temperature piezoresistive sensor material.This paper studies the preparation processing Precursor pyrolysis of amorphous polymer SiCN ceramic. SiCN of polymer derived ceramics havebeen made at different pyrolysis temperature of1000to1400℃. SiCN ceramics are amorphous microstructure at pyrolysis temperature of1000to1400℃according to analysis of X-ray.With the measurement and analysis of the electrochemical impedance spectroscopy, the SiCN ceramic composed of amorphous matrix and carbon phase. At the Impedance spectrum in the low frequency half arc corresponds to carbon, high frequency half arc corresponds to the amorphous matrix. The electrical conductivity of carbon phase in line with the Arrhenius formula, The electrical conductivity of the amorphous matrix phase is suitable for the conductive properties of amorphous semiconductor. From1000to1400℃pyrolysis temperature, the Raman spectroscopy analysis of the SiCN ceramics, found the cause of the conductivity of carbon phase increases with pyrolysis temperature is mainly carbon phase from the disordered sp2hybridization to a chain sp2hybridization. Dielectric tests show that the dielectric constant and dissipation of SiCN ceramic are the greatest at temperature of1300℃, because the free carbon clusters of amorphous SiCN come into condition of continuous phase, then form the percolation structure. In this paper, tradition processing has been improved and compared of difference performance of producing SiCN ceramic processing has been made. In this paper, tradition processing have been improved and Compared the different process under the difference SiCN ceramic preparation and performance. The significance of this study is to deepen our understanding of the microstructure and electrical properties of Precursor pyrolysis SiCN ceramics, and it plays an important role in studying the influence of different temperatures on the electrical properties of amorphous SiCN ceramic.