Study On Methods And Technologies Of Processing A Diffracted Crystal Of A Crystal Monochromator With Direct Cooling Structure

As an advanced third generation synchrotron radiation facility, Shanghai SynchrotronRadiation Facility was built in2009and seven beamlines are running currently. More beamlineswill be built in future and the number of beamlines is expected to be about60. As a very importantdiffracted component in beamlines, crystal monochromators are widely used in SSRF. The coolingstructure of crystal monochromators includes direct water cooling structure and indirect liquidnitrogen cooling structure, one of which is adopted according to the power density. Study the effectsof the optical properties of the diffracted crystal produced in the process by manufacturing adiffracted Single-crystal silicon with direct cooling structure and a new direct cooling structure isdesigned and simulated using ANSYS Workbench finite element analysis software. It will giveguidance to design and manufacture more and more precise Single-crystal silicon in future.As a research object, Single-crystal silicon is used to manufacture a diffracted crystal of amonochromator, includes the upper crystal and the lower crystal. The processing consists of bondingsilicon and ceramic base, testing the orientation of the silicon, reciprocating wire saw method andpolishing. Roughness and surface shape of the processing surface are tested and its rocking curve ismeasured in BL14B station at SSRF. The result shows that the data meet the design requirements,the broaden of the rocking curve using wire saw machine is smaller than that using outer machine.A new direct cooling structure is designed and the new diffracted crystal is simulated with ANSYSWorkbench finite element analysis software. Under working conditions, the simulation result showsthat the slope error of the meridian direction on the diffracted crystal surface with new direct coolingstructure is much smaller than that with old cooling structure and the cooling effect is also better.The new cooling structure is manufactured and the two crystals are bonded with3M-2216B/A epoxyadhesive. The size and orientation of the diffracted crystal are revised through the oriental wire sawmethod and polishing process. All the processing steps are completed at last, the angle of thediffraction plane and the crystal surface is less than30seconds through the measurement oforientation instrument.