Study On Characteristics Of Low-power Microwave Microplasma Linear Array

With the rapid development of MEMS, microwave has a good combination with microelectronics and plasma. Compared with the conventional plasma sources, the advantage of microplasma source is low cost, small size, easy to carry, no pollution, etc. Microplasma source has potential applications on display, light source, biomedical, micro chemical analysis systems, micro propulsion systems, micro laser, surface treatment of small material and other fields.In the thesis, according to microstrip theory and coupled-mode theory, an individual quarter-wavelength microstrip resonator, a linear array of 13 resonators and symmetry linear array are designed using HFSS. The effects of the ground plane size, feeding position, discharge gap width on resonant frequency and reflection coefficient of the microwave microplasma linear array are analyzed. The simulated results show that the microwave microplasma linear array based on 13 resonators has a resonate frequency at 2.45GHz and the reflection coefficient of-16.74dB as the feeding position is 3.3mm to the leftmost edge of the quarter-wavelength microstrip, the space between resonators is lmm, the width of coupling conductor is 2mm, the discharge gap is 0.1mm and the size of ground plane is 18.5mm*41.2mm.Finally, the microwave microplasma linear array of 13 resonators is fabricated, and the excitation of microplasma linear array is studied in different air pressure and input power. The experimental results show that the microplasma linear array is ignited at 3.0Torr in air when the input power is 13.44W, the microplasma linear array is not continuous when the input power is 12.35W, while the input power is 8.85W, the microplasma linear array is extinguished.