The Study On Characteristics Of Dielectric Barrier Discharge Which Driven By AC Voltage Source

Currently, low-temperature plasma has been widely applied in manyfields, Including the semiconductor industry, plasma electronics, metallurgy,and plasma corrosion etc. In particular, in the direction of the material surfacetreatment. Plasma processing technology can manufacture new materials thatwith excellent performance, and the technology of surface modification hasbeen very mature. There are many methods to generate low temperatureplasma, including low-pressure glow discharge, corona discharge, arcdischarge and DBD. The DBD method has been widespread concern. Becauseof it can reaction at atmospheric pressure, easy to achieve industrialization,and it can produce glow discharge that with a large volume, high energydensity plasma. The method of the study on DBD include experimentalresearch and numerical simulation. Due to the discharge includes not onlyphysical process, but also involves complex chemical reaction process, it isdifficult to achieve a complete and systematic understanding of the discharge.In order to control the trend of discharge and achieve glow discharge with richactive particles. Details are as follows: 1Summarize the theoretical knowledge of DBD and analysis theapplication value of different discharge mode.2Compare common modeling methods and introduce the details of relatingequations. Boundary condition has been set according to references.3Establish a one-dimensional fluid model to simulate argon multi-pulseDBD at one atmospheric, the distribution of current density, gap voltagedropping, the concentration of charged particles, electric field strength and otherparameters in spatial map has been done to analyze the mode of discharge.4Change the AC parameters, analysis the influence of driver voltageamplitude and frequency on DBD model. The innovation of this paper is that itgets detail analysis at peaks and valleys of current density curve anddemonstrates the role of the barrier dielectric.