Dielectric Super Lattices Adjacent To Filled Dielectric Grating Nano Structures And Its Fabrication Method

Optical surface wave is a widely applied electromagnetic wave, it is often used in integrated optics, gus-hanson drift increasement, the second harmonic, sensor of high sensitivity, fluorescence enhancement, etc. Predecessors have inspired photonic cryst-al’s surface wave by the preparation of one dimensional relief-type metal grating. H--owever, there are two major drawbacks in this structure, one is the absorption of inci--dent light in metal is large and it will lead to large loss, the other is that there is a lim--it of optical properties in the single design of embossed structure. In order to overco--me these two shortcomings, we designed the filling-type dielectric grating on the ba--sis of the former structure.This paper is based on Rigorous Coupled Wave Theory, mainly studied dielectric superlattices adjacent to filled dielectric grating nano structures and the surface wave properties and its preparation method. We excited the surface wave of dielectric supe--rlattice through the optimizing the material and structure of the grating. In order to get the improved performance of the surface wave and the transmission spectrum in band gap of the photonic crystal, we adjusted and optimized the structural parameters of the composite structure. Our research work is mainly including structural design/ software simulation, experimental preparation/sample test, and so on. The main results of our research are as follows:We studied the generation of non-radiative optical surface-wave wave and its characteristics in dielectric superlattices (photonic crystal) both theoretically and experimentally, we also innovatively studied the excitation and coupling mechanism of the surface wave with filled-type dielectric nano-grating structure;Based on guided-mode resonance’s theoretical models and analysis methods of rigorous coupled wave theory, and in order to achieve specific application of radiative optical surface wave, we designed and optimized the composite structure of dielectric superlattices/filled-type dielectric nano-grating which has a great value in application;We got the abnormal transmission spectrum and its field distribution in the band gap of dielectric supperlattices by COMSOL, discussed different parameters’ influen--ce on surface wave and its stimulation. We found these parameters (including the materials of superlattices and filling type grating, superlattice cycles, grating height, duty cycle of grating) have a great influence on spectrum characteristics of the narrow transmission peak.Through a lot of targeted optimization of structure parameters, we obtained the composite structure of dielectric superlattices/filling type nano-grating which has a great value to stimulate and couple optical surface wave with excellent performance.Through innovative and reliable experimental process, which based on nano im-printing with composite template, combined with electron beam evaporation, reactive ion etching, lift off technology, we successfully designed and prepared targeted comp--osite structure of dielectric superlattices/filling type nano grating;We tested our experimental samples, and obtained the ideal structure and related performance indicators.