Study On Emission Spectrum Diagnostic Technology For Nitrogen Plasmas Generated By A Pulsed Microwave Discharge

Microwave generating plasmas technology is applied to industry production veryearly. Recently people are more and more interested in pulsed microwave generating largearea uniform plasmas. This paper is mainly studying on pulsed microwave dischargegenerating nitrogen plasmas emission spectrum, in purposes to derive the variation ofdifferent temperatures (vibrational temperature, rotational temperature and electronicexcitation temperature) of nitrogen plasmas in different discharge conditions (differentpulse width and different discharge pressures) and try to explain the relations of thosetemperatures with the variation of different discharge conditions. As the resolution of thespectroscopic instrument is not able to distinguish the rotational peaks, the studies onvibrational temperature and rotational temperature mainly applies the methods ofsimulation. And the electronic excitation temperature depends on that the discharge isstrong enough to produce transitions of two states of electrons. The variation of vibrationaltemperature is similar to electronic excitation temperature in experiments, but thevariation of rotational temperature is different from vibrational temperature. And theremay be a process of energies exchange in those three temperatures.