Research Of GBCO Superconductor Film Deposited By RF Sputtering

High temperature Superconductor, due to its outstanding performancein electricity transporting and magnetic properties, has a promising wideapplication. The strip superconductor is the main function representation.We investigated several elements which can affect the performance ofGdBaCu2O7films deposited on CeO2substrate by RF sputteringinclude temperature, gas pressure and gas component, find out how theyaffect the films’ grow orientation, surface morphology and roughness. Atlast we analyzed the process and reasons.After these experiments, we got following conclusion:1. For the sake of finding the optical grow temperature which can letthe film grow along the right orientation; we configured several comparingexperiments and found that when the substrate temperature is nearby at880degree, we can get GdBaCu2O7films with high quality.2. We configure several experiments with different gas pressure tofind the optimal pressure condition while the substrate temperature is fixedat880degree, and the results demonstrated that40Pa is a good condition.3. After study the influence of temperature and gas pressure, we have researched how the oxygen argon ratio affects the films’ performance. Wefound that when the O2/Ar ratio at a high level (means that the oxygencomponent at a high level), the grain sizes would be large and the films aredense, with decreasing oxygen argon ratio, the roughness of the film wouldenhance, and the grain size reduced as well. Take all the effects intoaccount, we recommend that the optimum oxygen argon ratio is1:1.