The Research Of High Temperature Measurement Based On MEMS Thermopile Infrared Thermodetector

Temperature is a familiar physical quantity in scientific research and daily life, and effects all facets of them. So the measurement of temperature takes more and more attention on people, especially the rapidly and accurately measuring technique. But in many practical project, there are many objects demanding to measure transiently high temperature of their surface, it is hard to use traditional thermocouple for measuring because of very short processing time. Non-contact temperature detection characted by speediness and precision have showed it's particular advantage. For the purpose of search after new ideas and carrying out it, accroding to infrared temperature detecting principle, this paper innovate a solution composed by MEMS thermopile,infrared attenuatior,target material and memory module based on studying the static and dynamic characteristic of PerkinElmer company'MEMS thermopile infrared sensor. The research is carried out on theory analysis,experiment and calculating and experiment validation.This paper firstly introduces the temperature detecting theory of thermopile and MEMS technology, and analyzes the advantage and prospect of infrared temperature detecting. Based on these, a new surface high temperature measurement system is designed,which makes use of MEMS thermopile sensor. Then all parts'function of the system and their design guidelines are discoursed in detail. At one time, it is done to test the static and dynamic property accurately. Secondly, the attenuation property of single-crystal infrared material is researched in a deep way, which is a key element of the whole system. By using a measure system composed by blackbody source,attenuator and MEMS thermopile sensor, the attenuation property of single-crystal ZrO2 can be tested out. Then this paper gets a set of attenuation curve of different thickness attenuator, and calculates out the attenuation coefficient through utilizing Lambert-Beer Law, which can offer reference for designing the high temperature measurement system.Finally, the output from the MEMS thermopile sensor be acquisited and storaged in a memory module which bases on FPGA.