Research Of Related Technology Diamagnetic Micromotor

Based on MEMS technology, microgyroscopes have many advantages such as small size, light weight, low price, long life and ease of mass production,by which it is expected to partially replace the traditional gyros. However, it is generally constrained by the reality of low accuracy in the high-end fields. As the limit of manufacture and detection circuit, there is a great gap in the field of accuracy between domestic microgyroscope and foreign ones. Meanwhile, with the wide use of MEMS technology in the field of a micromechanical gyroscope, a novel micromachined gyroscope with an electrostatically suspended rotor is being studied deeply at home and abroad. Employing gyroscopic effect of the high speed rotational rotor, a micromachined electrostatically suspended gyroscope can detect the angular rate and the linear acceleration of the carrier. By means of the differential capacitance of the microgyro, the angular rate and acceleration of the carrier are then transferred into the capacitive alteration related, furthermore, into electrical output.Comparing with other inertial device, diamagnetic levitation micro device with free rotor can cancel the effect of contact friction, which exist in majority micro inertial device whose proof mass is connect with substrate by flexible beams, has the ability to be used as high resolution micro inertial device. The diamagnetic levitation, which consists of diamagnetic material and permanent magnet, has the advantage of working under room temperature, noenergy input, self stable levitation and suitable scale down effect for MEMS (Micro Electro Mechanical Systems) device. According to the principle, the diamagnetic levitation can be divided into diamagneticrotor levitation and diamagnetic stable permanent magnet rotor levitation. The dissertation work discussed here in mainly focus on the system study of the working principle, fabrication process and rotor testing and control circuit for its rotating drive, for the diamagnetic levitation micro device using as inertial sensor. The main research content and results of this dissertation are as follows:For understanding the principle of the stable levitation of rotor in the diamagnetic levitation micro device and it's using as inertial sensor, dynamic analysis have been done. Then diamagnetic stable permanent magnet rotor levitation micro device have been designed. And the structure of diamagnetic rotor levitation micro device and the micromanufacture process are presented. Lastly the experiment about the analysis of the suspended rotor-driven simulation and circuit has been done. Content include: (1) The mechanical analysis of the stability and rotation of diamagnetic micro-device is done. Analysis of the diamaglev system for the permanent magnet rotor tooth profile of static mechanics study show the stability under the structural parameters of the suspension permanent. (2) Using the MAXWELL 3D finite element analysis software in ANSOFT to analyse the problem of diamagnetic rotor suspension of suspended micro-device, of rotor suspension, stability, and rotation of the system simulation analysis, including stress analysis and displacement analysis. (3) Diamagnetic micro-device manufacturing process was studied. Manufacturing processes of stator and rotor are included. The stator consists of the micro-structure unit processed on glass substrates and a series of permanent magnetic ring combination. Micro-structure on a glass substrate was fabricated using MEMS technology. Ring magnets and pyrolytic graphite tooth rotor were fabricated by precision machining technology. (4) Suspended rotor drive and control circuits were studied. Suspended rotor axial rotation drive is based on the principle of variable capacitance micromotor. This paper studies the variable driving torque control, and gives the spin-driven Matlab simulation and the driver selected for the two-phase open-loop driver. (5) The related experiment of diamagnetic device is done.Experimental study mainly emphasis in diamagnetic rotor suspension micro-motor rotation testing, specifically including: (1) Suspended experiments: measuring the height of the rotor suspension, to prove the suspension stability of the rotor; (2) Rotating drive Experiment: Testing the rotor speed under the open-loop driving.