AIM Apparatus Drive Design And It's Research Of Auto Matching Algorithm

RF coupling system is widely used in the field of industrial and medical.In particular, coupled plasma system is the mainstream equipment in critical process of large-scale integrated circuits, LCD screens and so on,and impedance matching device is one of the a key component of this system. Enhance the impedance matching device's automatic adjustment functions and matching accuracy, to ensure the entire system keeped in a stable state, is an important factor of guarantee the quality and efficiency of products manufacture. Since there is no domestic product of automatic impedance device yet, research about the automatic impedance matching device has social significance and application value.This paper researches based on the hardware platform of automatic impedance matching system, and the primary work is shown as follows:1. Design the driver of automatic impedance matching system which is ARM-based.Give the design of the capacitive position detection and motor-driven adjustment procedures, to achieve adjustment of capacitance parameters by open-loop regulation, as well as closed-loop regulation based on the digital PID. Complete the analog and digital filter design used in reflection coefficient, and realize the rapid acquisition and processing of data.for man-machine interface receive and handle the key input based on interrupt and queue, and display messages on LCD.2. Since the gradient descent search used in Automatic impedance matching system has slow convergence and is easy to fall to local optimum value,simulated annealing algorithm is applied to the system here.Gives the analysis and design process of the algorithm,and some improvement also showed here.experiments verify the feasibility of the algorithm used in the automatically matching search.In the experimental platform to verify the algorithm used in the feasibility of automatically matching the search.Through the experimental data and theoretical analysis,the further optimization is made,and get the better effect of matching search.3. In accordance with user's demand, integrate the module drivers and matching algorithm to develop auto/manual adjustment functions.