Research On Control Algorithm About Fabricating Micro Optics Element By Mask Molding Method

By reviewing and analyzing the development status and trends in the field of micro optics, especially the production methods and their development situation, the conclusions are as bellow. The traditional methods of producing micro optical elements are binary overlay technology on VLSI (Very Large Scale Integrated circuites), the laser beam or electron beam direct writing technology evoluting from binary overlay technology, the gray-scale mask technology, the holography technology and the micro-machining technology laser-assisted. The technical core of traditional methods of producing micro-optical devices is planar etching process. There is difficulty for making the micro optical elements having complex structure and three-dimensional relief. Referring to rapid prototyping technology to develop new micro optical elements manufacturing technology, mask molding technology, it can overcome the shortcomings of planar etching process better, but the lack of mask molding technology control software seriously restricted the stability of quality and the efficiency for producing micro optical elements using this technology.Aiming at this situation, a suit of control system software for making micro-optical devices based on mask molding technology is developed in this paper. Its main job is as follows. According to the hardware system and the manufacturing process of fabricating micro-optial devices by mask molding technology in laboratory, control system programs of software is designed, including exporting the three-dimensional model of micro-optical devices, reading the STL data and reproducing the model algorithm in Visual C++, slicing model algorithm, filling the cross-section contour after slicing algorithm and generating BMP format picture. such as the mask. According to the module's interface, these algorithms are studied, designed and programmed implementation one by one.The phase-type Fresnel Zone Len is optimized and designed using the simulated annealing genetic algorithm. The main job includes selecting phase depth as the optimizion parameter, identifying and deriving the evaluation function of Fresnel Zone Len, setting the parameters of simulated annealing genetic algorithm in reason, and optimizing by programming to obtain the optimum combination of phase depth. Taking Fresnel Zone Lens as an example, the control software of the mask molding technology is analied and verified in this paper. The simulation result by computer shows that this control software is feasible and effective.If this control software combins with mask molding technology, it can be used for making micro-devices of non-micro-optics areas. So it has significance of the development of MOEMS (Micro-Optical-Electro-Mechanical Systems).