Fundamental Research Of The Coupling System Composed Of The Tapered Fiber And Micro-toroids On The Basis Of MEMS

These years, optical micro-cavities (micro-spheres, micro-pillars, micro-disks, micro- toroids) have excellence nonlinear optics and quantum characteristics owning to"whispering gallery mode", making them very promising in cavity quantum electrodynamics, photonics, nonlinear optics , biological and chemical sensors , ultra-low threshold Raman lasers , optical frequency comb, optical clock and so on. As a novel micro-cavity, Planar Toroid Micro-cavities support batch production using MEMS fabrication technology. Morever, through adjusting the two important structural parameters: principal and minor diameters, ultra-high Q can be achieved, making it excellent candidate to do high-sensitivity sensing and nonlinear optical effect research.Referencing researching scheme in famous group all around the world, we do some significative work in the planar micro-toroids, for example, design optimization, manufacture, measuring and so on.At first, Discussing and analyzing what influence Q and V of the planar micro-toroids , we designed the high performance micro-toroids, and optimize it. We simulated some parameter about micro-toroids in order to obtain the higer value of Q/V. Finally, we have contrived higher performance micro-toroid cavities to success in fabricating it.Then, we design a fabrication process after we surveyed the inland micro-process technology. We have fabricated the planar micro-disk cavities of fixed size by a series of traditional MEMS micro-process technics including thermal growth, photolithography and etching and so on. Based on these we set a planar micro-disk surface process flat using CO2 laser. Through many tries we success to fabricate the planar micro-toroid cavities with CO2 laser(COHERENT, K-500).We choose fiber-taper as the pump coupler of the planer micro-toroid cavity in order to study the optical properties of the planar micro-toroid cavity. And we set a fabrication flat of fiber-taper to fabricate fiber-taper couplers with different lengths of taper region and taper angle in order to backup the experiment.Finally, we build up the coupling system composed by the planar micro-toroid cavity and fiber-taper fabricated in our laboratory. We gain primary results through changing the coupling distance by PZT modulator with a tunable pump laser system (NewFocus6328). Additionally, we design a Cavity Ring Down method to measure the quality factor Q and that is very important to optimize the coupling system and further study of optical properties of planar micro-toroid cavities.