Research And Development Of A Inspection And Analysis System For The Large Caliber Optical Surface Purification

The purification of optical surface is very important to the load of laser facility. While the present testing methods of optical surface purification are mostly dominated by naked-eye observing. Consequently the testing is too much deliberately interfered, and the operation is rather complicated, with a low precision. But the advantages of image inspection and analysis are accurate, quick, credible and digital compared with manual work inspect. So research and develop a inspection and analysis system for the optical surface purification.Paper first gives a brief account of the background of surface purification, provides some criteria of surface purification testing, and makes a comparison and contrast between some purification testing methods adopted home and abroad, and brings forward the research orientation and task of this thesis. It is main study content that develop a sort of inspection and analysis system applied in optical surface purification. The system are composed of DALSE CCD, video acquire card, lamp-house, scan device, the image processing computer etc. Calibrate this system with rule of three, and calibration precision arrives at application requirement.The mostly functions of the inspection and analysis system are acquiring and processing images, segmentation of images and measure images. It can automatically differentiate and pick-up available information of the original image, such as area and perimeter, by image processing and segmentation; may semiautomatically measure the location of a spot on the image, the length of lines, area size; may automatically detect distances between edges by edge detection; at the same time have common functions of small image processing software, such as addition or subtract of images, morphological processing and image segmentation.Paper last discusses the key technique used in the system, which is including that the intensity and deformation of mechanical was analyzed by ANSYS Workbench software, combination programming for Matlab and VC to deal with images and analyze images, morphology technique for characters of contamination.