Research On Fabrication Of Refraction Microlens Arrays For Optical Fiber Bundles

With the rapid development of modern science and technology, the manufacture process of micro-optics has greatly improved. As one of the most important devices in micro-optics, microlens is widely used in many fields and needed urgently. In recent years optical fibers used in transferring image field is more and more regarded because the fiber has good flexility and ability of sending optical signal and has great application in military field such as missile warning receiver system.Since optical fiber bundles inherently has low fill factor and low light gathering efficiency,to enhance the light transferring performance,it is desirable to integrate microlens array with optical fiber bundles.In this thesis manufacture process of refractive microlens matching a certain fiber array is presented and the integration technology is also given. The main contents of this thesis are as follows:(1) Present the design principle of the microlens at a viewpoint of optical fill factor and geometrical optical theory. Design formulas of the ball crown-shaped refraction microlens and square refraction microlens are given and structure parameters are obtained from simulating results by using ZEMAX software.(2) Design a manufacture process and give a detail description on the entire manufacture process including acquisition of imaging data,mask layout and processing schedule.Fabrication of refractive microlens array using thermal melting method are mainly studied.(3) Test and analyze the refraction microlens, and compute the parameters of the microlens according to the design theory and formulas, simulate and analyse the capability of gathering light for the microlens array.(4) Achieve the integration of optical fiber array with the microlens array by using a home-made alignment platform.