Research On Kernel Technology Of A Parallel Wafer Robot

This dissertation is focused upon the development of a complete theoretical package in terms of the dimensional optimization synthesis,servomotor parameters estimation and kinematics calibration of a 2-DOF rotative parallel wafer robot for rapid transportation operations. The following works have been completed.Based on the architectural characteristics of a 2-DOF parallel wafer robot under consideration and according to the vector theory, analytical representations of inverse and forward kinematics are formulated in conjunction with the velocity and acceleration analysis. Consequently, dimensional synthesis of the 2-DOF translational parallel wafer robot is carried out by analysis of the design variables vs. a global conditioning index, which is proposed by considering both the mean value and fluctuation of the condition number of Jacobian matrix. Meanwhile, a set of appropriate constraints has been considered in terms of the force transmission behavior and the workspace/machine volume ratio in practical implementation.With the aid of the principle of virtual work, the dynamic model of the robot has been formulated. An approach to estimate the servomotor parameters is proposed using the singular value decomposition technique, resulting in the mapping function between the maximum value of joint variables and the unit operation variables.Considering the influence to the input moment of the servo system, the trajectory planning of the parallel manipulator was developed in the workspace with the minimum operation period as the objective function.These research results have some guiding effect on the follow-up virtul prototype development and the design of wafer robot.