The Dynamic Analysis And Visual Inspection Research On Single-Crystal Growth Furnace Lifting Structure Swing Phenomenon

The smooth of lifting is the key factor of producing high-quality single crystal by Cz-method, so excellent lifting system is the important part to improve the performance and efficiency of single crystal furnace. In this paper, the swing amplitude inspection of TDR single crystal furnace lifting system is studied. The main research works of this dissertation are as follows:Dynamics of fixed-length pendulum models under the centrifugal force and vibration force of TDR single crystal furnace lifting system are built. After computer simulation analysis in detail, we find that the vibration force dynamics single pendulum which is amended by double pendulum model is accord with actual swing phenomenon. Then the main factor of lifting system swing problem is founded, this research provides the theoretical support to resolve single crystal furnace lifting system swing phenomenon.Combined with advanced computer visual detection technology and using the theory such as camera calibration, image preprocessing, moving object extraction and positioning, etc, a computer visual detection precept is put forward, a set of experiment system based on computer visual detection is developed and inspection software is designed for the single crystal furnace lifting system swing amplitude inspection. The result of the inspection experiment shows the feasibility of the visual inspection system.